Compound materials and other products
SiC coated graphite(PERMA KOTE®)
SEM Photograph of PERMA KOTE® Surface
With the rapid progress in higher density semiconductor products, high purified graphite has grown in demand so as to reduce gas desorption of carbon surfaces as well as the amount of dust and impurities. Made by depositing a SiC layer on isotropic graphite using CVD process, PERMA KOTER is widely used in the semiconductor manufacturing industry.
Characteristics of PERMA KOTE®
SiC coated graphite(PERMA KOTE®)
Pancake susceptor
The susceptors used in processes that form the epitaxial layer on semiconductor wafers, whether pancake type or barrel type, barrel, require an SiC coated graphite.
SiC coated graphite(PERMA KOTE®)
Barrel susceptor
PERMA KOTE® is a graphite product coated with high purified SiC, which has high heat and corrosion resistance.
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